TY  - BOOK
AU  - Weed, Tracy, ed.
TI  - 25th Annual BACUS Symposium on Photomask Technology
T2  - Proceedings of SPIE; V. 5992
SN  - 9780819460141 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5992
ER  -