00512nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245006500113260003200178300002000210490003300230856010300263IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819460141 (Print)  cIIA Library  aWeed, Tracy, ed. 0a25th Annual BACUS Symposium on Photomask Technologyh[eBook]  aWashington, USAbSPIEc2005  aOnline resource  aProceedings of SPIE; V. 5992  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5992yClick Here to Access eBook