@book{22727,
	author = {Weed, Tracy, ed.},
	title = {25th Annual BACUS Symposium on Photomask Technology},
	publisher = {SPIE},
	year = {2005},
	series = {Proceedings of SPIE; V. 5992},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5992}
}