TY  - BOOK
AU  - Staud, Wolf, ed.
TI  - 24th Annual BACUS Symposium on Photomask Technology
T2  - Proceedings of SPIE; V. 5567
SN  - 9780819455130 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5567
ER  -