00512nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245006500113260003200178300002000210490003300230856010300263IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819455130 (Print)  cIIA Library  aStaud, Wolf, ed. 0a24th Annual BACUS Symposium on Photomask Technologyh[eBook]  aWashington, USAbSPIEc2004  aOnline resource  aProceedings of SPIE; V. 5567  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5567yClick Here to Access eBook