TY  - BOOK
AU  - Behringer, Uwe, ed.
TI  - 23rd European Mask and Lithography Conference
T2  - Proceedings of SPIE; V. 6533
SN  - 9780819466556 (Print)
PY  - 2007///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6533
ER  -