TY  - BOOK
AU  - Kimmel, Kurt, ed.
TI  - 23rd Annual BACUS Symposium on Photomask Technology
T2  - Proceedings of SPIE; V. 5256
SN  - 9780819451439 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5256
ER  -