00513nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245006500114260003200179300002000211490003300231856010300264IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819451439 (Print)  cIIA Library  aKimmel, Kurt, ed. 0a23rd Annual BACUS Symposium on Photomask Technologyh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 5256  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5256yClick Here to Access eBook