@book{22713,
	author = {Kimmel, Kurt, ed.},
	title = {23rd Annual BACUS Symposium on Photomask Technology},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 5256},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5256}
}