TY  - BOOK
AU  - Behringer, Uwe, ed.
TI  - 22nd European Mask and Lithography Conference
T2  - Proceedings of SPIE; V. 6281
SN  - 9780819463562 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6281
ER  -