TY  - BOOK
AU  - Grenon, Brian, ed.
TI  - 22nd Annual BACUS Symposium on Photomask Technology
T2  - Proceedings of SPIE; V. 4889
SN  - 9780819446756 (Print)
PY  - 2002///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4889
ER  -