@book{22707,
	author = {Grenon, Brian, ed.},
	title = {22nd Annual BACUS Symposium on Photomask Technology},
	publisher = {SPIE},
	year = {2002},
	series = {Proceedings of SPIE; V. 4889},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4889}
}