TY  - BOOK
AU  - Dao, Giang, ed.
TI  - 21st Annual BACUS Symposium on Photomask Technology
T2  - Proceedings of SPIE; V. 4562
SN  - 9780819442901 (Print)
PY  - 2002///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4562
ER  -