00511nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002000092245006500112260003200177300002000209490003300229856010300262IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819442901 (Print)  cIIA Library  aDao, Giang, ed. 0a21st Annual BACUS Symposium on Photomask Technologyh[eBook]  aWashington, USAbSPIEc2002  aOnline resource  aProceedings of SPIE; V. 4562  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4562yClick Here to Access eBook