@book{22700,
	author = {Dao, Giang, ed.},
	title = {21st Annual BACUS Symposium on Photomask Technology},
	publisher = {SPIE},
	year = {2002},
	series = {Proceedings of SPIE; V. 4562},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4562}
}