@book{22693,
	author = {Behringer, Uwe, ed.},
	title = {20th European Conference on Mask Technology for Integrated Circuits and Microcomponents},
	publisher = {SPIE},
	year = {2004},
	series = {Proceedings of SPIE; V. 5504},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5504}
}