TY  - BOOK
AU  - Grenon, Brian, ed.
TI  - 20th Annual BACUS Symposium on Photomask Technology
T2  - Proceedings of SPIE; V. 4186
SN  - 9780819438492 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4186
ER  -