00845nam a2200193Ia 4500003000900000008004100009020002600050020002700076040001600103100002700119245012600146260003200272300002000304490003400324856010400358942000700462999001700469952016500486IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510636583 (Print)  a9781510636590 (Online)  cIIA Library  aLi, Baojun, ed.941310 0a2019 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devicesh[eBook]  aWashington, USAbSPIEc2020  aOnline resource  aProceedings of SPIE; V. 11440  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11440yClick Here to Access eBook  cEB  c22686d22686  00104070aBANbBANd2011-07-01eSPIEhV. 11440l0pEB2146r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11440w2021-11-05yEB