00568nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245011900115260003200234300002000266490003300286856010300319IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628418057 (Print)  cIIA Library  aZhou, Zhiping, ed. 0a2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabricationh[eBook]  aWashington, USAbSPIEc2015  aOnline resource  aProceedings of SPIE; V. 9624  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9624yClick Here to Access eBook