TY  - BOOK
AU  - Zhou, Zhaoying, ed.
TI  - 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
T2  - Proceedings of SPIE; V. 7510
SN  - 9780819478962 (Print)
PY  - 2009///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7510
ER  -