Zhou, Zhaoying, ed. <br/><br/>
2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications  [eBook] 

 - Washington, USA  SPIE  2009 
 - Online resource 
 - Proceedings of SPIE; V. 7510 .
<br/><br/><label>ISBN: </label>9780819478962 (Print)