@book{22639,
	author = {Zhou, Zhaoying, ed.},
	title = {2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications},
	publisher = {SPIE},
	year = {2009},
	series = {Proceedings of SPIE; V. 7510},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7510}
}