00590nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245014100115260003200256300002000288490003300308856010300341IN-BaIIA211028s9999 xx s 000 0 eng d a9780819474025 (Print) cIIA Library aZhang, Xuping, ed. 0a2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integrationh[eBook] aWashington, USAbSPIEc2009 aOnline resource aProceedings of SPIE; V. 7158 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7158yClick Here to Access eBook