00570nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245012000116260003200236300002000268490003300288856010300321IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819474032 (Print)  cIIA Library  aZhou, Zhaoying, ed. 0a2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applicationsh[eBook]  aWashington, USAbSPIEc2009  aOnline resource  aProceedings of SPIE; V. 7159  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7159yClick Here to Access eBook