@book{22619,
	author = {Behringer, Uwe, ed.},
	title = {19th European Conference on Mask Technology for Integrated Circuits and Microcomponents},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 5148},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5148}
}