TY  - BOOK
AU  - Abboud, Frank, ed.
TI  - 19th Annual Symposium on Photomask Technology
T2  - Proceedings of SPIE; V. 3873
SN  - 9780819434685 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3873
ER  -