@book{22617,
	author = {Abboud, Frank, ed.},
	title = {19th Annual Symposium on Photomask Technology},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3873},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3873}
}