00516nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245006900113260003200182300002000214490003300234856010300267IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819427625 (Print)  cIIA Library  aAatre, Vasu, ed. 0a1996 Symposium on Smart Materials, Structures, and MEMSh[eBook]  aWashington, USAbSPIEc1998  aOnline resource  aProceedings of SPIE; V. 3321  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3321yClick Here to Access eBook