TY  - BOOK
AU  - Behringer, Uwe, ed.
TI  - 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
T2  - Proceedings of SPIE; V. 4764
SN  - 9780819445315 (Print)
PY  - 2002///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4764
ER  -