00551nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245010100116260003200217300002000249490003300269856010300302IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819445315 (Print)  cIIA Library  aBehringer, Uwe, ed. 0a18th European Conference on Mask Technology for Integrated Circuits and Microcomponentsh[eBook]  aWashington, USAbSPIEc2002  aOnline resource  aProceedings of SPIE; V. 4764  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4764yClick Here to Access eBook