Behringer, Uwe, ed. <br/><br/>
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents  [eBook] 

 - Washington, USA  SPIE  2002 
 - Online resource 
 - Proceedings of SPIE; V. 4764 .
<br/><br/><label>ISBN: </label>9780819445315 (Print)