@book{22591,
	author = {Behringer, Uwe, ed.},
	title = {18th European Conference on Mask Technology for Integrated Circuits and Microcomponents},
	publisher = {SPIE},
	year = {2002},
	series = {Proceedings of SPIE; V. 4764},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4764}
}