TY  - BOOK
AU  - Grenon, Brian, ed.
TI  - 18th Annual BACUS Symposium on Photomask Technology and Management
T2  - Proceedings of SPIE; V. 3546
SN  - 9780819430076 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3546
ER  -