00529nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245008000115260003200195300002000227490003300247856010300280IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819430076 (Print)  cIIA Library  aGrenon, Brian, ed. 0a18th Annual BACUS Symposium on Photomask Technology and Managementh[eBook]  aWashington, USAbSPIEc1998  aOnline resource  aProceedings of SPIE; V. 3546  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3546yClick Here to Access eBook