@book{22588,
	author = {Grenon, Brian, ed.},
	title = {18th Annual BACUS Symposium on Photomask Technology and Management},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3546},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3546}
}