TY  - BOOK
AU  - Behringer, Uwe, ed.
TI  - 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents
T2  - Proceedings of SPIE; V. 4349
SN  - 9780819440396 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4349
ER  -