@book{22579,
	author = {Behringer, Uwe, ed.},
	title = {17th European Conference on Mask Technology for Integrated Circuits and Microcomponents},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4349},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4349}
}