TY  - BOOK
AU  - Reynolds, James, ed.
TI  - 17th Annual BACUS Symposium on Photomask Technology and Management
T2  - Proceedings of SPIE; V. 3236
SN  - 9780819426697 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3236
ER  -