00531nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245008000117260003200197300002000229490003300249856010300282IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819426697 (Print)  cIIA Library  aReynolds, James, ed. 0a17th Annual BACUS Symposium on Photomask Technology and Managementh[eBook]  aWashington, USAbSPIEc1998  aOnline resource  aProceedings of SPIE; V. 3236  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3236yClick Here to Access eBook