Behringer, Uwe, ed. <br/><br/>
16th European Conference on Mask Technology for Integrated Circuits and Microcomponents  [eBook] 

 - Washington, USA  SPIE  2000 
 - Online resource 
 - Proceedings of SPIE; V. 3996 .
<br/><br/><label>ISBN: </label>9780819436146 (Print)