TY  - BOOK
AU  - Shelden, Gilbert, ed.
TI  - 16th Annual BACUS Symposium on Photomask Technology and Management
T2  - Proceedings of SPIE; V. 2884
SN  - 9780819422828 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2884
ER  -