@book{22567,
	author = {Shelden, Gilbert, ed.},
	title = {16th Annual BACUS Symposium on Photomask Technology and Management},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2884},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2884}
}