TY  - BOOK
AU  - Behringer, Uwe, ed.
TI  - 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98
T2  - Proceedings of SPIE; V. 3665
SN  - 9780819431394 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3665
ER  -