Behringer, Uwe, ed. <br/><br/>
15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98  [eBook] 

 - Washington, USA  SPIE  1999 
 - Online resource 
 - Proceedings of SPIE; V. 3665 .
<br/><br/><label>ISBN: </label>9780819431394 (Print)