@book{22559,
	author = {Behringer, Uwe, ed.},
	title = {15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3665},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3665}
}