Shelden, Gilbert, ed. <br/><br/>
15th Annual BACUS Symposium on Photomask Technology and Management  [eBook] 

 - Washington, USA  SPIE  1995 
 - Online resource 
 - Proceedings of SPIE; V. 2621 .
<br/><br/><label>ISBN: </label>9780819419859 (Print)