@book{22557,
	author = {Shelden, Gilbert, ed.},
	title = {15th Annual BACUS Symposium on Photomask Technology and Management},
	publisher = {SPIE},
	year = {1995},
	series = {Proceedings of SPIE; V. 2621},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2621}
}