TY  - BOOK
AU  - Brodsky, William, ed.
TI  - 14th Annual BACUS Symposium on Photomask Technology and Management
T2  - Proceedings of SPIE; V. 2322
SN  - 9780819416537 (Print)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2322
ER  -