00532nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245008000118260003200198300002000230490003300250856010300283IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819416537 (Print)  cIIA Library  aBrodsky, William, ed. 0a14th Annual BACUS Symposium on Photomask Technology and Managementh[eBook]  aWashington, USAbSPIEc1994  aOnline resource  aProceedings of SPIE; V. 2322  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2322yClick Here to Access eBook