TY  - BOOK
AU  - Grady, Edward, ed.
TI  - 13th Annual BACUS Symposium on Photomask Technology and Management
T2  - Proceedings of SPIE; V. 2087
SN  - 9780819413567 (Print)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2087
ER  -